Washington Nanofabrication Facility

NanoES hosts the Washington Nanofabrication Facility (WNF) at the University of Washington, a full-service micro and nanotechnology user facility focused on enabling basic and applied research, advanced R&D, and prototype production.

Recently renovated, WNF supports an ISO Class 5 cleanroom and is the largest publicly accessible fabrication facility in the Pacific Northwest. WNF is an open-access facility that enables a diverse user base to leverage tools and processes to innovate in an efficient and timely manner. WNF is part of the Northwest Nanotechnology Infrastructure (NNI) at UW, as well as the larger National Nanotechnology Coordinated Infrastructure (NNCI).

WNF capabilities include photolithography and wet process, nano-lithography, dry etching, physical vapor deposition, chemical vapor deposition and thermal processing, metrology, back-end-of-line (BEOL), as well as a wide variety of other nanofabrication tools.

WNF Website









Fluke Hall

WNF is located in Fluke Hall, a ten-minute walk from the NanoES building.


For more information on the Washington Nanofabrication Facility and the planning process, contact