Northwest Nanotechnology Infrastructure

University of Washington

Washington Nanofabrication Facility (WNF)

WNF is a full-service micro and nanofabrication user facility focused on enabling basic and applied research, advanced R&D, and prototype production. With the completion of a $37 million renovation in fall of 2017, WNF’s total cleanroom space expanded to 15,000 square feet, making it the largest fabrication facility in the Pacific Northwest. WNF capabilities include photolithography and wet process, nano-lithography, dry etching, physical vapor deposition, chemical vapor deposition and thermal processing, metrology, back-end-of-line (BEOL), as well as a wide variety of other nanofabrication tools.

WNF Website


Oregon State University

Advanced Technology and Manufacturing Institute (ATAMI)

ATAMI, located on Hewlett Packard’s Corvallis campus, provides shared space to industrial startups, Fortune 500 companies and academic researchers. ATAMI’s capabilities enable R&D in hierarchical product and process development, advanced materials development and rapid prototyping and development of microscale devices.

ATAMI Website

Materials Synthesis & Characterization Facility (MaSC)

MaSC is the only publicly accessible cleanroom in the state of Oregon. MASC faculty and staff provide deep experience in thin-film deposition, device fabrication, and materials analysis, serving as a hub for materials and device development on the Oregon State University campus.

MASC Website