NanoES Institute

Washington Nanofabrication Facility

The Washington Nanofabrication Facility (WNF) is an open-access UW facility that enables users to leverage tools and processes to innovate in an efficient and timely manner that will ultimately provide knowledge and stimulate economic growth. WNF is a primary physical site of the Northwest Nanotechnology Infrastructure (NNI), part of the National Nanotechnology Coordinated Infrastructure (NNCI). WNF capabilities include photolithography and wet process, nano-lithography, dry etching, physical vapor deposition, chemical vapor deposition and thermal processing, metrology, back-end-of-line (BEOL), as well as a wide variety of other nanofabrication tools. Further details can be found on the WNF website.

WNF is located in Fluke Hall, a short drive or ten-minute walk from the NanoES building.