Nanofabrication Short Course
September 17 - September 21
This non-credit short course is a survey of nanofabrication techniques, tools, and methods. The course will involve hands-on laboratory sessions coupled with lectures that will give attendees a high-level and real-time experience in fabrication technologies. Attendees will fabricate and electrically test multiple devices on single wafers and make a keepsake sample that represents their newly acquired skills. Over five days, the course will review process flows, lithography, metrology, additive and subtractive technologies, surface modification, CAD design for photomasks, Back-End-of-Line, packaging, and advanced/emerging technologies. Participants will obtain Institute of Electrical and Electronics Engineers (IEEE) certification in the form of 4 Continuing Education Units (CEU) or 40 Professional Development Hours (PDH).
The course instructor is Dr. Michael Khbeis, director of the Washington Nanofabrication Facility (WNF).
Course Flyer (PDF)